Universal Microsystems
High precision, restrictive flow orifices for
gas flow control


48531 Warm Springs Blvd. Bld. 415
Fremont, California 94539
Phone: 510-490-3900
Fax: 510-490-3916 E-mail Us

    Orifice Restrictor vs Sintered Media Restrictor
> Better flow repeatability +/- 1percent per lot
> Better Stability, no clogging
> Lower back pressure effect
> Less dry down time
> Accurate surrogate gas calibration
> Unique shape, won't be confused with standard male/male unions

    Orifice Restrictor vs. Gasket
> Doesn't wear out     - reassemble any number of times
> Readable label   - out of package gaskets have no ID
> Visible component of gas line   - can't be forgotten
> Completely stable flow   -over tightening gaskets can change flow considerably

  Replace an expensive MFC with a pressure regulator,
  a valve and a precision flow orifice.
> Stability & Repeatability 0.1percent vs. 0.2 percent
> Less seat leakage, 10-8 vs. 10-4 atm cc/sec
> Accurate surrogate gas calibration
> Multi-gas compatibility for each unit
> Lower cost, fewer system components
> Field interchangeable
               
Universal Microsystems