Serving the Semiconductor Industry since 1999
Click here for detailed Schematics by Model type
CAD Drawings
|
|
Universal Microsystems
High precision, restrictive flow orifices for
gas flow control
|
48531 Warm Springs Blvd. Bld. 415
Fremont, California 94539
Phone: 510-490-3900
Fax: 510-490-3916
E-mail Us
|
Precison Flow Orifice Specifications
|
|
> Surface finish, 10 or 5 Ra electropolish
> Wetted parts, sapphire orifices: 316L SS & sapphire
> Wetted parts, silicon orifices: Viton or Kalrez & PCTFE
> He leak check 10-9 atm-cc/sec
> Maximum pressure, 200 psia
> Temperature range, 50 to 250 oF
> Fittings, VCR, tube stub, Surface Mount
|
Precision Flow Orifice Characteristics
|
|
> Completely stable
> No Particle Generation
> Minimal dry down time
> Flow accuracy +/- 2 percent available
> Orifice will not clog like a filter
|
|