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Universal Microsystems
High precision, restrictive flow orifices for
gas flow control
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48531 Warm Springs Blvd. Bldg 415
Fremont, California 94539
Phone: 510-490-3900
Fax: 510-490-3916
E-mail Us
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Precision Flow Orifices Simplify Mass Flow Control
Precision Flow Orifices
from Universal Microsystems simplify many of the gas delivery systems used in the semiconductor industry. A precise orifice inside a leak tight, stainless steel enclosure, results in a very precise and repeatable flow from any fixed pressure source
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B-series
1/4" VCR M/M, 1.55" length
with flow direction arrow &
viewable PN or serial number
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G-Series
1/4" VCR M/M, 1.37" length
flow direction arrow and
orifice ID stamp
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Tubing
1/4" SS
for welding or
compression union
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Primary Gas Flow Standards
Check flowmeter readings to +/- 1 sccm up to 500 sccm FS and +/- 3 sccm up to 3 slm FS
Learn More
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Gasket Restrictor 1/4" VCR fitting Available with N and R orifices
Request Info
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Applications for Precision flow Orifices
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Custom surface labels. Choose:
> Gas flow specifications
> Your company's part #
> UMS model #
> Serial number (option available some models)
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> Pressure based, orifice controlled, flow
> He leak check 10-9 atm-cm/sec
> 5 Ra surface finish
> Standard flow accuracy ± 5.0 percent
> Calibration accuracy from Primary Standards
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For quotes or additional information
E-mail Us
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